ULTAGO
Turntable Machine for various Applications
The ULTAGO is a powerful laser processing workstation designed for high-precision applications in the photovoltaic, precision engineering, and electronic industries. It achieves maximum throughput for solar cells or ceramic substrates and is used in high-volume production environments. Different from linear table machines, in the turntable machine loading, unloading, alignment, as well as laser processing are carried out in parallel in order to reach optimum productivity.
Features
- Single or dual scanner setup
- Automatic camera calibration
- Automated routines for reference runs
- Automated process control
- 3-, 5- or even 8-Point alignment methods available (wafer edges or fiducials)
- Stand alone and production line integrated systems
Technical Data
| Accuracy | < +/- 35 µm (1 sigma) < +/- 10 µm optionally < +/- 2 µm repeatability |
Substrate |
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| Available laser sources | Wave length: 1064, 1030, 532, 515, 355 nm Pulse: µs, ns, ps, fs |
| Laser spot size | 10 - 300 µm |
| Dimensions with Automation | 2400 x 1600 x 2300 mm 3600 x 3500 x 2300 mm |
| Weight | 3500 - 4200 kg |
| Power supply | 260 - 480 V |
| Compressed dry air | 6-7 bar |
| Cooling water | 5 - 20 l/min |
Options
- CAD file import
- SQL data base for process and event tracking
- MES interface (SECS GEM PV2)
- Integrated process metrology
- Semi-automatic handling (R&D)
- Fully-automatic handling (production)
Applications
Photovoltaic
- Backside PERC / Contact Opening
- IBC Solar Cell Processing
- Cell Cutting
- Frontside SiN Ablation
- Laser Diffusion
- LFC (Laser Fired Contacts): FolMet
- Laser Edge Isolation
- MWT / EWT (Via-Drilling)
Electronic
- Via Drilling
- Ceramic Scribing
- Ceramic Cutting
- Ceramic Drilling
- Micromachining
- Wafer Dicing