ULTAGO NX
The next generation InnoLas Solutions Turntable Machine
The ULTAGO NX is a powerful laser processing workstation designed for high-precision applications in the photovoltaic industry. It achieves throughput of 6000 wafers per hour for solar cells and is used in high-volume production environments. Different from linear table machines, in the turntable machine loading, unloading, alignment, as well as laser processing are carried out in parallel in order to reach optimum productivity.
Features
- multi scanner setup
- Automatic camera calibration
- Automated routines for reference runs
- Automated process control
- 3-, 5- or even 8-Point alignment methods available (wafer edges or fiducials)
- Stand alone and production line integrated systems
Technical Data
| Accuracy | < +/- 35 µm (1 sigma) < +/- 10 µm optionally < +/- 2 µm repeatability |
Substrate |
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| Available laser sources | Wave length: 1064, 1030, 532, 515, 355 nm Pulse: µs, ns, ps, fs |
| Laser spot size | 10 - 300 µm |
| Dimensions | 2400 x 1600 x 2300 mm |
| Power supply | 260 - 480 V |
| Compressed dry air | 6-7 bar |
| Cooling water | 5 - 20 l/min |
| Throughput | 6000 wafers per hour |
Options
- CAD file import
- SQL data base for process and event tracking
- MES interface (SECS GEM PV2)
- Integrated process metrology
- Semi-automatic handling (R&D)
- Fully-automatic handling (production)
Applications
Photovoltaic
- Laser Contact Opening for PERC
- Laser Doped Selective Emitter
- Laser Direct Cleaving for half cells
- Laser Contact Opening for Plating on Silicon