Laser machine for cSi-solar cell processing

The next generation laser processing system for cSi solar cells

The LUMION is a state of  the art laser system for cSi solar cell processing. It achieves a throughput of  up to 7.500 wafers/ hour and is used in 24/ 7 high-volume production. The LUMION is available for for various applicatons such as Laser Doped Selective Emitter (LDSE), Passivated Emitter Rear Contact cells (PERC) and laser direct cleaving- cell cutting (LDC) .

The system can be configured as a stand- alone system with loading and unloading automation or as an integrated PERC processing module into existing printing lines.



  • Cost effective design
  • Simple and easy to maintain design
  • Dedicated solution for cSi solar cell processing
  • Ultra high speed Galvo Scanner
  • Automatic calibration routines
  • InnoLas μVIsion
  • Windows 10 IoT
  • Touch display
  • Fully automated stand-alone system
  • Fully integrated PERC-module in printer line

Download Technical Data

Technical Data
Accuracy< +/-25 μm (1 sigma)

up to 166 x 166 mm
0.1mm – 0.15mm
mono or poly crystalline silicon square/ pseudo square
DimensionsWidth: 6449mm; Depth: 2145mm;
Height: 2100mm; Weight: 2800kg
ThroughputUp to 7500 wafer per hour
  • Integrated AOI with closed loop function
  • Standalone buffer unit for inline solutions

Thin film ablation, laser and mechanical scribing (P1/P2/P3/P4), laser edge deletion, TCO patterning, glass cutting