LUMION
Laser machine for cSi-solar cell processing
The next generation laser processing system for cSi solar cells
The LUMION is a state of the art laser system for cSi solar cell processing. It achieves a throughput of up to 7.500 wafers/ hour and is used in 24/ 7 high-volume production. The LUMION is available for for various applicatons such as Laser Doped Selective Emitter (LDSE), Passivated Emitter Rear Contact cells (PERC) and laser direct cleaving- cell cutting (LDC) .
The system can be configured as a stand- alone system with loading and unloading automation or as an integrated PERC processing module into existing printing lines.
Features
- Cost effective design
- Simple and easy to maintain design
- Dedicated solution for cSi solar cell processing
- Ultra high speed Galvo Scanner
- Automatic calibration routines
- InnoLas μVIsion
- Windows 10 IoT
- Touch display
- Fully automated stand-alone system
- Fully integrated PERC-module in printer line
Technical Data
| Accuracy | < +/-25 μm (1 sigma) |
| Substrate Dimensions Thickness Material | up to 166 x 166 mm 0.1mm – 0.15mm mono or poly crystalline silicon square/ pseudo square |
| Dimensions | Width: 6449mm; Depth: 2145mm; Height: 2100mm; Weight: 2800kg |
| Throughput | Up to 7500 wafer per hour |
Options
- Integrated AOI with closed loop function
- Standalone buffer unit for inline solutions
Applications
Thin film ablation, laser and mechanical scribing (P1/P2/P3/P4), laser edge deletion, TCO patterning, glass cutting