LINEXO
LINEAR TABLE MACHINE FOR VARIOUS APPLICATIONS
The LINEXO is a versatile laser processing workstation designed for high-precision applications in the electronic, precision engineering, and photovoltaic industries. It is often used in R&D environments, as well as production of smaller substrates as e.g. ceramic PCBs.
Features
- Fixed optic or scanner setup
- Single or dual process heads
- Process gas (N2,O2,Ar,...)
- Processing one or more substrates in parallel
- Automatic camera calibration
- Automated routines for reference runs
- Automated process control
- Automated vision system for precision alignment and scaling, offset, trapezoidal and rotation compensation.
- Stand alone and production line integrated systems
Technical Data
| Accuracy | < +/- 10 µm abs. < +/- 2 µm repeatability |
| Substrate Dimensions Thickness Material | up to 610 x 410 mm > 50 µm PCB, Ceramic, Silicon, Steel |
| Available laser sources | Wave length: 9.4, 10.6 µm (CO2) 1064, 1030, 532, 515, 355 nm Pulse: µs, ns, ps, fs |
| Laser spot size | 10 - 300 µm |
| Dimensions | 1900 x 2800 x 1900 mm |
| Weight | 3500 - 4200 kg |
| Power supply | 200 - 480 V |
| Compressed dry air | 6 - 7 bar |
| Cooling water | 5 - 20 l/min |
Options
- CAD file import (Excellon 2, Sieb & Meyer, Gerber)
- SQL data base for process and event tracking
- MES interface (SECS GEM PV2)
- Integrated process metrology
- Semi-automatic handling (R&D)
- Fully-automatic handling (production)
Applications
Electronic
- Via Drilling
- PCB Cutting
- PCB Structuring
- Cavity Formation
- Ceramic Scribing
- Ceramic Cutting
- Ceramic Drilling
- Cavity Formation
- Micromachining
- Wafer Dicing
- Selective DBR / Metal Removal
- Micro structuring of printing plates
Photovoltaic
- for R&D